JPH0712825Y2 - クリーンルーム - Google Patents
クリーンルームInfo
- Publication number
- JPH0712825Y2 JPH0712825Y2 JP3934789U JP3934789U JPH0712825Y2 JP H0712825 Y2 JPH0712825 Y2 JP H0712825Y2 JP 3934789 U JP3934789 U JP 3934789U JP 3934789 U JP3934789 U JP 3934789U JP H0712825 Y2 JPH0712825 Y2 JP H0712825Y2
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- air
- harmful gas
- filter
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002245 particle Substances 0.000 claims description 26
- 239000003463 adsorbent Substances 0.000 claims description 4
- 238000004140 cleaning Methods 0.000 claims description 4
- 238000007599 discharging Methods 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 45
- 238000001784 detoxification Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 12
- 239000003795 chemical substances by application Substances 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000003365 glass fiber Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000004887 air purification Methods 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
Landscapes
- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3934789U JPH0712825Y2 (ja) | 1989-04-03 | 1989-04-03 | クリーンルーム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3934789U JPH0712825Y2 (ja) | 1989-04-03 | 1989-04-03 | クリーンルーム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02131143U JPH02131143U (en]) | 1990-10-31 |
| JPH0712825Y2 true JPH0712825Y2 (ja) | 1995-03-29 |
Family
ID=31548180
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3934789U Expired - Fee Related JPH0712825Y2 (ja) | 1989-04-03 | 1989-04-03 | クリーンルーム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0712825Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022538130A (ja) * | 2019-07-22 | 2022-08-31 | エス．ワイ． テクノロジー， エンジニアリング アンド コンストラクション カンパニー リミテッド | プロセス排気を利用する省エネ換気システム |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2536957B2 (ja) * | 1990-08-31 | 1996-09-25 | 日立プラント建設株式会社 | クリ―ンル―ム |
| JP2530755B2 (ja) * | 1990-12-21 | 1996-09-04 | 東レ株式会社 | システム畳およびクリ―ン化ル―ム |
| US6897165B2 (en) | 2001-06-06 | 2005-05-24 | Matsushita Electric Industrial Co., Ltd. | Environmental control equipment/method of developing apparatus for developing light-exposed resist film with developer in wafer treating chamber |
-
1989
- 1989-04-03 JP JP3934789U patent/JPH0712825Y2/ja not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| 社団法人日本空気清浄協会編「空気清浄ハンドブック」昭和６０年１０月２０日オーム社発行３２６〜３４０ページ４３７ページ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022538130A (ja) * | 2019-07-22 | 2022-08-31 | エス．ワイ． テクノロジー， エンジニアリング アンド コンストラクション カンパニー リミテッド | プロセス排気を利用する省エネ換気システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02131143U (en]) | 1990-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |